MEMS 203: Making a MicroPressure Sensor - a ten step process for fabricating a MEMS pressure sensor. What is a MEMS pressure sensor? Ten steps of making a pressure sensor SCME''s classroom kits that support understanding this process, Pressure Sensor Model Kit, Lift-off kit, Anisotropic Etch kit, and Pressure Sensor Process Kit.
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- Micro and Nanotechnologies
