Lab Mode Availability:
“Download Template Laboratory” gives you an example of the lab as taught at Penn State;
“Download Turnkey Laboratory” gives you a lab experience complete with video.
E SC 211 / 212 / 213 / 214 / 215 / 216 |
E SC 214: Patterning for Nanotechnology
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Unit |
Lecture Video and PowerPoint Availability
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Associated Laboratory Availability
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Topics Covered |
Unit 1 - Advanced Lithography General Information |
Lecture 1: Some Basics of Photolithography |
PPT PDF Video
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E SC 214 Labs
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Resist information, primer technologies, electromagnetic spectra, post-exposure bake, development |
Unit 2 - Advanced Lithography Tool Technologies |
Lecture 1: Maneuvering Light |
PPT PDF Video
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E SC 214 Labs
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Optical considerations, anti-reflective coatings, alignment and exposure systems |
Unit 3 - Advanced Lithography and Resists |
Lecture 1: Introduction to Resists |
PPT PDF Video
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E SC 214 Labs
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Photoresists Overview, SU-8 2000 Photoresist Series, AZ nLOF 2000 Photoresist Series, 495K & 950K PMMA Photo and E-beam Resists in Anisole, ZEP-520A E-beam Resist |
Unit 4 - Novel Lithography Techniques |
Lecture 1: Introduction to Other Pattern Transfer Approaches |
PPT PDF Video
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E SC 214 Labs
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Nanoimprint Lithography, UV Molding, Edge Lithography, Stamp Lithography, Probe Lithography, Self-Assembly Lithography, Block Copolymer Patterning |
Unit 5 - Novel Lithography Techniques: Block Copolymer Patterning |
Lecture 1: Further Introduction to Other Pattern Transfer Approaches |
PPT PDF Video
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E SC 214 Labs
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Block Copolymer Patterning |