Lab Mode Availability:
“Download Template Laboratory” gives you an example of the lab as taught at Penn State;
“Download Turnkey Laboratory” gives you a lab experience complete with video.
| E SC 211 / 212 / 213 / 214 / 215 / 216 |
|
E SC 215: Nanotechnology Applications
|
| Unit |
Lecture Video
and PowerPoint Availability
|
Associated Laboratory Availability
|
Topics Covered |
| Unit 1 - Material Fabrication Utilizing Plasma Enhanced Chemical Vapor Deposition (PECVD) |
| Lecture 1: Physical and Chemical Vapor Deposition |
PPT
PDF
Video
|
E SC 215 Labs
|
Plasma Deposition Introduction, Deposition Coverage, Six Basic Steps of Chemical Vapor Deposition, Film Growth, PECVD Deposition Issues, and Types |
| Unit 2 - Material Fabrication Utilizing Dry Etch Chemistry |
| Lecture 1: Plasmas and Materials |
PPT
PDF
Video
|
E SC 215 Labs
|
Understanding the Plasma Process |
| Lecture 2: Plasma Removal Processes |
PPT
PDF
Video
|
E SC 215 Labs
|
Chemistry, Recipe Parameters, Etch Profiles, Endpoint |
| Unit 3 - Advanced Etch Systems |
| Lecture 1: The Tools for Plasma Removal Processes |
PPT
PDF
Video
|
E SC 215 Labs
|
Etch Systems, Cluster Tools |
| Unit 4 - Oxidation and Dielectric Materials |
| Lecture 1: Dielectrics by Growth and Deposition |
PPT
PDF
Video
|
E SC 215 Labs
|
Types of Oxide, Furnace Deposition, High Pressure Oxidation, Chemical Vapor Deposition, Modifying Dielectric Constant |
| Unit 5 - Organic Solar Cells |
| Lecture 1: Application of Nanotechnology to Solar Cells |
PPT
PDF
Video
|
E SC 215 Labs
|
Solar Cell Energy Conversion, Technology and Materials, Processing Sequence, Characterization of Devices, Future Trends |
