E SC 214: Patterning for Nanotechnology

This web page, from the Nanotechnology Applications and Career Knowledge Support Center (NACK Center), includes materials for the undergraduate laboratory course titled Patterning for Nanotechnology. The following five units are included in the course: Advanced Lithography General Information, Advanced Lithography Tool Technologies, Advanced Lithography and Resists, Novel Lithography Techniques, and Novel Lithography Techniques: Block Copolymer Patterning.

Each unit includes a number of lectures and laboratory activities that can be viewed separately or downloaded in .ppt and .pdf formats. Lectures provide in-depth coverage of each topic, including illustrations, examples, and comprehensive information. Users must set up a free account to download the materials.