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Top-Down Nanomanufacturing: Deposition

This overview of nanotechnology is presented by the NaMCATE project. According to the introductory page, "in related silicon processes for fabrication of MEMS (microelectromechanical devices), deposition of so-called sacrificial layers of oxides or other material are made, and then these layers are removed to free the moving mechanical components from being bonded to the surface." In this module, the various deposition processes are described. Additionally, the module provides three learning activities titled Sputtering Copper, Evaporative Deposition, and Electrochemical Deposition and Chemical Etching. Lastly, a performance assessment and PowerPoint presentation are included. Users must create a free login in order to access materials.

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