Wet Oxidation Process

In this video, created by Support Center for Microsystems Education (SCME), viewers can watch an animation on the wet oxidation process. This animation "illustrates the chemistry of a wet thermal oxidation process that is used to grow silicon dioxide (SiO2) on a silicon (Si) wafer. In a wet oxidation process, water vapor (H2O) interacts with the silicon atoms at the SiO2-Si interface to form SiO2. This process is discussed in more detail in the Deposition Overview for MEMS Learning Module" found on the SCME website.