This workshop covers a fabrication process for a MEMS pressure sensor. After studying the 10 step process, participants will complete two of the process steps (lift-off and anisotropic etch) using actual fabricated chips. Participants will also study 10 chips that represent each step of the fabrication process. They will identify the process represented by each chip and arrange the chips in the correct process order. Workshop discussions will include where and how this material and the related activities can be incorporated into an existing curriculum.

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