This workshop covers several important introductory topics related to MEMS fabrication: Crystallography, Oxidation, Light Interference and Etch. Participants will complete several activities to help them better identify crystal planes of silicon wafers, determine silicon oxide thickness based on its color, and calculate and estimate the growth rates and the etch rates of silicon dioxide. Workshop discussions will include where and how this material and the related activities can be incorporated into an existing curriculum.

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