This is a one day workshop on micro and nano machining for high aspect ratio structures in glass, silicon, silicon carbide, PZT and other materials, held at the Lurie Nanofabrication Facility at the University of Michigan in Ann Arbor, MI.
The short course will include both classroom lectures and hands-on activities relevant to many different applications. Topics that will be covered include:
DRIE on Si, glass, other materials
Metrology and analysis of etched results
Design rules
Masking strategies: resists and others
Review of LNF capabilities
…and much more!!!!
The short course will include both classroom lectures and hands-on activities relevant to many different applications. Topics that will be covered include:
DRIE on Si, glass, other materials
Metrology and analysis of etched results
Design rules
Masking strategies: resists and others
Review of LNF capabilities
…and much more!!!!
- Workshop
- Micro and Nanotechnologies
