This workshop covers a complete 10 step process used to fabricate a micro-sized pressure sensor. Topics include a review of deposition, photolithography and etch processes, and how these processes are applied in the fabrication of a MEMS device. Activities include identifying actual processed chips that show each step of the fabrication process, completing the lift-off process on actual metal-deposited chips, and building a model or computer graphic that illustrates the fabrication steps and the correct sequence. This workshop uses SCME's Pressure Sensor Process Kit and Lift-off Kit to provide hands-on learning for many of these activities.
- Workshop
- Micro and Nanotechnologies