This workshop covers a variety of different micro-sized components (e.g., accelerometers, surface acoustical wave devices (SAWs), cantilevers arrays, microfluidic components), how they are used and the different micro-machining processes that are used to fabricate them. The majority of the time in this workshop is spent working in teams to build a three-dimensional model of a micro-sized component that addresses a specific application. In addition to creating a model, each team develops an outline of a fabrication process that could be used to build the device. This workshop uses SCME’s MEMS Innovators Kit to complete the activity.

NOTE: To get the most out of this workshop and this kit, it is best that you already have a basic knowledge of MEMS and MEMS fabrication processes. This is NOT an introductory workshop.

Type:
  • Workshop
ATE Area:
  • Micro and Nanotechnologies
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Micro-Devices (MEMS) - How Do They Work-.ics

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