The foundations of Chemical Vapor Deposition (CVD) will be reviewed, with a focus on Low Pressure CVD (LPCVD), typical deposition system design, and the two modes of deposition. These modes will examine thin films, known as 2-dimensional nanoscale materials, and nanowires, known as 1-dimensional nanoscale materials. A lab tour with a look at a working CVD system may be included.
- Workshop
- Micro and Nanotechnologies
