This class is designed to introduce the student to basic concepts in vacuum technology and how they apply to system design and operation. Subjects covered include molecular density in vacuum, the ideal gas law, molecular flow in vacuum pressure regimes, characteristics of gas composition at various molecular densities, general principles of gas-solid interactions, vacuum pump technology, pressure sensors, leak detection and the impact of fundamental design decisions and operating practices on vacuum system performance. It is intended for people who are new to vacuum or may not have any formal training. It also provides a general review for those who have had some formal training in vacuum technology. The student should achieve a general understanding of vacuum technology as a foundation for further training in vacuum system design and thin film deposition.
- Micro and Nanotechnologies