Nanotechnology Principles Lab: Lithography

By SHINE Project1; SHINE Project1

1. SHINE: Seattle's Hub for Industry-driven Nanotechnology Education

Published on

Abstract

This lab consists of activities designed to teach students about lithography.

The entire bundle can be downloaded by clicking on the download link in the upper right or compontents can be individually downloaded by visiting the Supporting Docs tab.

Learning Objectives:

  • To understand how lithography, including photolithography and soft lithography is used to make electronic and biomedical devices and nano- and micro- scale 3D printed objects
  • To make simple patterns using photolithography and soft lithography type processes
  • To understand how microfluidics are used in biological analysis
  • To understand that chips can be made in many designs depending on the purpose of the chip
  • To understand that analysis of materials at the micro and nano scale require less space, fluid, and can be done differently because of how properties of materials change at a small scale – the basis of “lab on a chip”

Lab Contents:

  • Presentation Slides
  • Background needed before lab activities
  • Photo Lithography Lab activity
  • 3D Printing Lab activity
  • Soft Lithography: Making a pH Sensor Microfluidic Device Lab activity
  • References and Websites
  • MSDS: Materials Safety Data Sheet

 

Sponsored by

This material is based upon work supported by the National Science Foundation under Grant Number 1204279.  Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Cite this work

Researchers should cite this work as follows:

  • SHINE Project, SHINE Project (2015), "Nanotechnology Principles Lab: Lithography," https://nanohub.org/resources/23190.

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Submitter

Brian Rucci, Kristine Schroeder

SHINE: Seattle's Hub for Industry-driven Nanotechnology Education

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