Miniaturized machines

8:36

Micro Electro Mechanical Systems technology

10:20

MEMS for communications

13:05

Micromachines today

14:33

MEMS technology today: actuation forces

16:05

MEMS technology today: 3D structures

18:33

Micromachines technology evolution

21:11

Very large-scale integration

22:15

MEMS-based Spatial Light Modulators

24:23

From MEMS to NEMS

28:35

Intelligent micro-systems

37:16

A vision for intelligent microsystems

42:31

Metasurface-based flat optics

43:14

Metasurfaces and MEMS

45:20

Origami - Kirigami structures

47:24

Kirigami-based metasurfaces

49:54

Intelligent microscale systems: what's next?

50:36

The Next Big Thing (?) tema: what's next?

50:46

Conclusions

52:35

Acknowledgements

53:27