Lab Mode Availability:
“Download Template Laboratory” gives you an example of the lab as taught at Penn State;
“Download Turnkey Laboratory” gives you a lab experience complete with video.
E SC 211 / 212 / 213 / 214 / 215 / 216 |
E SC 215: Nanotechnology Applications
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Unit |
Lecture Video and PowerPoint Availability
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Associated Laboratory Availability
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Topics Covered |
Unit 1 - Material Fabrication Utilizing Plasma Enhanced Chemical Vapor Deposition (PECVD) |
Lecture 1: Physical and Chemical Vapor Deposition |
PPT PDF Video
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E SC 215 Labs
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Plasma Deposition Introduction, Deposition Coverage, Six Basic Steps of Chemical Vapor Deposition, Film Growth, PECVD Deposition Issues, and Types |
Unit 2 - Material Fabrication Utilizing Dry Etch Chemistry |
Lecture 1: Plasmas and Materials |
PPT PDF Video
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E SC 215 Labs
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Understanding the Plasma Process |
Lecture 2: Plasma Removal Processes |
PPT PDF Video
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E SC 215 Labs
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Chemistry, Recipe Parameters, Etch Profiles, Endpoint |
Unit 3 - Advanced Etch Systems |
Lecture 1: The Tools for Plasma Removal Processes |
PPT PDF Video
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E SC 215 Labs
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Etch Systems, Cluster Tools |
Unit 4 - Oxidation and Dielectric Materials |
Lecture 1: Dielectrics by Growth and Deposition |
PPT PDF Video
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E SC 215 Labs
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Types of Oxide, Furnace Deposition, High Pressure Oxidation, Chemical Vapor Deposition, Modifying Dielectric Constant |
Unit 5 - Organic Solar Cells |
Lecture 1: Application of Nanotechnology to Solar Cells |
PPT PDF Video
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E SC 215 Labs
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Solar Cell Energy Conversion, Technology and Materials, Processing Sequence, Characterization of Devices, Future Trends |