E SC 212: Basic Nanotechnology Processes

This web page, from the Nanotechnology Applications and Career Knowledge Support Center (NACK Center), includes materials for the undergraduate laboratory course titled Basic Nanotechnology Processes. The following seven units are included: An Introduction to Processing, An Introduction to Uses of Plasma in Processing, An Introduction to Wet Etching, An Introduction to Basic Pattern Transfer, Chemical Vapor Deposition, Physical Deposition, and Advanced Etch Systems. 

Each unit includes a number of lectures and laboratory activities that can be viewed separately or downloaded in .ppt and .pdf formats. Lectures provide in-depth coverage of each topic, including illustrations, examples, and comprehensive information. Links are also provided for template and turnkey laboratories. Users must set up a free account to download the materials.