MEMS Applications Overview Learning Module

Module Description:

This module, from Support Center for Microsystems Education (SCME), introduces students to "some of the many applications of MEMS and allow[s] them to explore areas of their personal interest." This module is divided into the following three units: MEMS Applications Overview Primary Knowledge (PK), MEMS Applications Research Activity, and MEMS Applications Assessment. 

Module Contents: 

This module includes four instructor guides, three participant guides, and a presentation. PDF and DOC versions are provided for all of the guides. The included guides are MEMS Applications Overview Primary Knowledge, MEMS Applications Overview: Research Activity, and MEMS Applications Overview Assessment. Instructor guides include additional content such as instructor notes and questions and answers. A Learning Module Map (LM) Instructor Guide is also included. 

The LM map provides information about the module including module contents, target audience, and a map that is divided into the following three sections: Important Steps, Key Points, and Reasons. 

MEMS Applications Overview Primary Knowledge is an instructional unit with the following learning objectives: 

• State three fields in which MEMS devices are being used.
• State three applications of MEMS devices in the automobile industry.
• State three applications for MEMS in the medical field.

The following sections are included in this unit guide: Introduction, Macro vs. Micro, Objectives, What are MEMS, A Note on Terminology, Applications of MEMS, MEMS Sensors, MEMS Pressure Sensors, Applications of MEMS Pressure Sensors, and more.

In the MEMS Applications Overview: Research Activity, students "research one of the applications discussed in the Primary Knowledge unit (MEMS Applications Overview) or [they] may find another application or potential application for MEMS." Objectives for the activity include:

• Describe the operation of a MEMS or MEMS device within a specific application.
• Discuss the effectiveness of the MEMS or MEMS device within this application as compared to previous methods.

The MEMS Applications Overview Assessment includes ten questions and is intended to be given at the conclusion of the module. 

A presentation is also included that provides a unit overview and introductory information about MEMS, types of MEMS, as well as examples of MEMS applications in various industries. The presentation is provided in both PDF and PowerPoint formats

For orientation purposes 3-App_Intro_LM_MAP_IG.pdf is included as a separate attachment and offers a sample of the type of material included in this module. 

Below is a list of the files included in the .zip attachment. The size of each file is included in parenthesis. 

MEMS Applications Overview Learning Module (24 files, 42.6 MB)

• Instructor Guides
  • Docs
    • MEMS Applications Overview: Research Activity Instructor Guide (App_Intro_AC30_IG_Feb2017.docx 246 KB)
    • MEMS Applications Overview Assessment Instructor Guide (App_Intro_FA30_IG_Feb2017.docx 412 KB)
    • Learning Module Map for MEMS Applications Overview (App_Intro_LM_MAP_IG_Feb2017.docx 133 KB)
    • MEMS Applications Overview Primary Knowledge Instructor Guide (App_Intro_PK30_IG_Feb2017.docx 5.7 MB)
  • PDFs
    • Learning Module Map for MEMS Applications Overview (3-App_Intro_LM_MAP_IG.pdf 87 KB)
    • MEMS Applications Overview Primary Knowledge Instructor Guide (4-App_Intro_PK30_IG.pdf 4.3 MB)
    • MEMS Applications Overview: Research Activity Instructor Guide (5-App_Intro_AC30_IG.pdf 322 KB)
    • MEMS Applications Overview Assessment Instructor Guide (6_App_Intro_FA30_IG.pdf 4532 KB)
• Participant Guides
  • Docs
    • MEMS Applications Overview: Research Activity Participant Guide (App_Intro_AC30_PG_Feb 2017.docx 253 KB)
    • MEMS Applications Overview Assessment Participant Guide (App_Intro_FA30_PG_Feb2017.docx 399 KB)
    • MEMS Applications Overview Primary Knowledge Participant Guide (App_Intro_PK30_PG_Feb2017.docx 5.6 KB)
  • PDFs
    • MEMS Applications Overview Primary Knowledge Participant Guide (3-App_Intro_PK30_PG.pdf 4.3 MB)
    • MEMS Applications Overview: Research Activity Participant Guide (4-App_Intro_AC30_PG.pdf 324 KB)
    • MEMS Applications Overview Assessment Participant Guide (5-App_Intro_FA30_PG.pdf 440 KB)
• Presentation
  • MEMS Applications Overview (Presentation_MEMS_Applications.pdf 9.8 MB)
  • MEMS Applications Overview (Presentation_MEMS_Applications.pptx 9.8 MB)