MTTC Pressure Sensor Process Learning Module

Module Description:

This module, from Support Center for Microsystems Education (SCME), covers the fabrication process of a microelectromechanical system (MEMS) process sensor. The module was originally designed to support a one week workshop where students build micro-sized pressure sensors. The module "has since been revised to support the workshop as well as classroom kits that can be used to teach the process." These kits are available for purchase through SCME's website. Three of the five activities included in this module require the classroom kits.

Module Contents:

This module includes nine instructor guides, eight participant guides, and three PowerPoint presentations. All guides include PDF and Word versions. The included guides are MTTC Pressure Sensor Process Knowledge Probe (KP), Manufacturing Technology Training Center (MTTC) Pressure Sensor Process Primary Knowledge, Cleanroom Activity, A MEMS Process Model Activity, Micro Pressure Sensor Process Activity, Surface Micromachining: Lift-Off Process Activity, Bulk Micromachining: An Etch Process Activity, and Pressure Sensor Process Assessment. Instructor guides include additional content such as instructor notes as well as questions and answers. A Learning Module Map Instructor Guide is also included.

The Learning Module Map provides information about the module including module contents, target audience, and a map that is divided into the following three sections: Important Steps, Key Points, and Reasons. 

The Knowledge Probe is intended as a pre-quiz to assess the participant's current knowledge of MEMS pressure sensors and the fabrication process of these sensors. Ten questions are included.

The Primary Knowledge Guide is an instructional unit that should be completed before any activities. The following sections are included: Introduction, Objectives / Outcomes, Terminology, The Pressure Sensor Membrane, How Does the Pressure Sensor Work, The Making of a Pressure Sensor, Bare Silicon Wafer - Step 1, Silicon Nitride Deposition - Step 2, Backside Photolithography - Step 3 Overview, and more. 

The five activities included in the module are intended to help participant's learn and demonstrate their understanding of the pressor processes. These activities include an introduction, objectives and outcomes, a list of supplies needed, and directions. Two activities include post activity questions. Three classroom activities require the purchase of class room kits. 

The three presentations included in this module cover the following topics: pressure sensor, finding change in pressure, pressure sensor features, bare silicon, silicon nitride deposition, backside photolithography - coat, front side photolithography - expose, and more. PDF and PowerPoint versions are included for each presentation.

The Pressure Sensor Process Assessment is intended for evaluating "the participant's knowledge and understanding of the information covered in the related primary knowledge unit." Ten questions are included. 

For orientation purposes Fab_PrOvw_P1_LMmap_IG.pdf is included as a separate attachment and offers a sample of the type of the material included in this module.

Below is a list of the files included in the .zip attachment. The size of each file is included in parenthesis.

MTTC Pressure Sensor Process (50 files, 187.9 MB)

• Instructor Guides
  • PDFs
    • Cleanroom Activity Instructor Guide (Fab_PrOvw_AC10_IG.pdf 4.3 MB)
    • A MEMS Process Model Activity Instructor Guide (Fab_PrOvw_AC10a_IG.pdf 393 KB)
    • Micro Pressure Sensor Process Activity Instructor Guide (Fab_PrOvw_AC10b_IG.pdf 9.1 MB)
    • Surface Micromachining: Lift-Off Process Activity Instructor Guide (Fab_PrOvw_AC11_IG.pdf 525 KB)
    • Bulk Micromachining: An Etch Process Activity Instructor Guide (Fab_PrOvw_AC12_IG.pdf 378 KB)
    • Pressure Sensor Process Assessment Instructor Guide (Fab_PrOvw_FA10_IG.pdf 129 KB)
    • MTTC Pressure Sensor Process Knowledge Probe (KP) Instructor Guide (Fab_PrOvw_KP10_IG.pdf 136 KB)
    • Manufacturing Technology Training Center (MTTC) Pressure Sensor Process Learning Module Map  (Fab_PrOvw_P1_LMmap_IG.pdf 127 KB)
    • Manufacturing Technology Training Center (MTTC) Presor Sensor Process Primary Knowledge Instructor Guide (Fab_PrOvw_PK10_IG.pdf 11.5 MB)
  • Word DOCs
    • Cleanroom Activity Instructor Guide (Fab_PrOvw_AC10_IG_August2017.docx 9.2 MB)
    • A MEMS Process Model Activity Instructor Guide (Fab_PrOvw_AC10a_IG_August2017.docx 404 KB)
    • Micro Pressure Sensor Process Activity Instructor Guide (Fab_PrOvw_AC10b_IG_August2017.docx 8.9 MB)
    • Surface Micromachining: Lift-Off Process Activity Instructor Guide (Fab_PrOvw_AC11_IG_August2017.docx 352 KB)
    • Bulk Micromachining: An Etch Process Activity Instructor Guide (Fab_PrOvw_AC12_IG_August2017.docx 273 KB)
    • Pressure Sensor Process Assessment Instructor Guide (Fab_PrOvw_FA10_IG_August2017.docx 34 KB)
    • MTTC Pressure Sensor Process Knowledge Probe (KP) Instructor Guide (Fab_PrOvw_KP10_IG_August2017.docx 35 KB)
    • Manufacturing Technology Training Center (MTTC) Pressure Sensor Process Learning Module Map  (Fab_PrOvw_P1_LMmap_IG_August2017.docx 29 KB)
    • Manufacturing Technology Training Center (MTTC) Pressure Sensor Process Primary Knowledge Instructor Guide (Fab_PrOvw_PK10_IG_August2017.docx 12.3 MB)
• Participant Guides
  • PDFs
    • Cleanroom Activity Participant Guide (Fab_PrOvw_AC10_PG.pdf 4.3 MB)
    • A MEMS Process Model Activity Participant Guide (Fab_PrOvw_AC10a_PG.pdf 380 KB)
    • Micro Pressure Sensor Process Activity Participant Guide (Fab_PrOvw_AC10b_PG.pdf 10.7 MB)
    • Surface Micromachining: Lift-Off Process Activity Participant Guide (Fab_PrOvw_AC11_PG.pdf 447 KB)
    • Bulk Micromachining: An Etch Process Activity Participant Guide (Fab_PrOvw_AC12_PG.pdf 368 KB)
    • Pressure Sensor Process Assessment Participant Guide (Fab_PrOvw_FA10_PG.pdf 96 KB)
    • MTTC Pressure Sensor Process Knowledge Probe (KP) Participant Guide (Fab_PrOvw_P1_KP10_PG.pdf 127 KB)
    • Manufacturing Technology Training Center (MTTC) Pressure Sensor Process Primary Knowledge Participant Guide (Fab_PrOvw_PK10_PG.pdf 11.5 MB)
  • Word DOCs
    • Cleanroom Activity Participant Guide (Fab_PrOvw_AC10_PG_August2017.docx 9.2 MB)
    • A MEMS Process Model Activity Participant Guide (Fab_PrOvw_AC10a_PG_August2017.docx 402 KB)
    • Micro Pressure Sensor Process Activity Participant Guide (Fab_PrOvw_AC10b_PG_August2017.docx 8.9 MB)
    • Surface Micromachining: Lift-Off Process Activity Participant Guide (Fab_PrOvw_AC11_PG_August2017.docx 342 KB)
    • Bulk Micromachining: An Etch Process Activity Participant Guide (Fab_PrOvw_AC12_PG_August2017.docx 270 KB)
    • Pressure Sensor Process Assessment Participant Guide (Fab_PrOvw_FA10_PG_August2017.docx 32 KB)
    • MTTC Pressure Sensor Process Knowledge Probe (KP) Participant Guide (Fab_PrOvw_P1_KP10_PG_August2017.docx 34 KB)
    • Manufacturing Technology Training Center (MTTC) Pressure Sensor Process Primary Knowledge Participant Guide (Fab_PrOvw_PK10_PG_August2017.docx 12.3 MB)
• Presentations
  • PDFs
    • MTTC Pressure Sensor Process Storyboard Presentation (MTTC_PS_Process_LM_Presentation.pdf 22.9 MB)
    • MTTC Pressure Sensor Process Storyboard Imposed (MTTCProcessStoryboard_IMPOSED.pdf 7 MB)
    • MTTC Pressure Sensor Process Storyboard (MTTCProcessStoryboard.pdf 4.7 MB)
  • PowerPoints
    • MTTC Pressure Sensor Process Storyboard Presentation (MTTC_PS_Process_LM_Presentation.pptx 19 MB)
    • MTTC Pressure Sensor Process Storyboard Imposed (MTTCProcessStoryboard_Back.pptx 6.6 MB)
    • MTTC Pressure Sensor Process Storyboard (MTTCProcessStoryboard.pptx 9.6 MB)