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This page from the Southwest Center for Microsystems Education features a learning module which presents a general overview of various etch processes used in the construction of microsystems. The module is divided into three sections: Instructors, Participants, and Presentations. Module documents include Bulk Micromachining Activity, Final Assessment, Knowledge Probe, Learning Module Map, Lesson, Science of Thin Films Activity, Terminology Activity, and Etch Overview presentation slides. Users are encouraged to create a free account to access the full set of resources. 

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