ATE Central

MEMS Making Micro Machines Learning Module

Module Description:

This module, from the Support Center for Microsystems Education (SMCE), supports the Making Micro Machines film. The module contains activities and assessments related to the film. "The film introduces MEMS (microelectromechanical systems), applications, fabrications, and design. This learning module provides activities to encourage the students to delve deeper into the topics introduced in the film and to demonstrate their understanding of the terminology and general concepts of MEMS." The DVD is available to purchase from Silicon Run Productions. A film script is provided in the contents of this module.

Module Contents:

This module includes seven instructor guides and six participant guides. All documents include versions in PDF and Word. The included guides are Making Micromachines Script with Chapters, Activity 1 - Microfluidics, Activity 2 - Optical MEMS, Activity 3 - MEMS Sensors Design, Knowledge Probe (Pre-Assessment), and Final Assessment. Instructor guides include additional content such as instructor notes and questions and answers. A Learning Module Map Instructor Guide is also included. 

The Learning Module Map provides information about the module including the film, module contents, target audience, and a map that is divided into the following sections: Important Steps, Key Points, and Reasons.

The knowledge probe includes 20 questions and can be used to "assess the participants current knowledge of MEMS, MEMS applications, fabrication, packaging, and design."

Each activity is to be completed after watching the corresponding sections of the film. The activities include descriptions, introductions, activity objectives and outcomes, crossword puzzles, and post-activity questions.

The Final Assessment includes 20 questions and can be used to determine participants' knowledge after watching the film and completing the three activities.

For orientation purposes the 'MEMS_video_P1_LM_Map' PDF is included as a separate attachment and offers a sample of the type of material included in the module. 

Below is a list of the files contained within the .zip attachment. The size of each module is included in parenthesis.

MEMS - Making Micro Machines (33 files, 10.3 MB)

  • Instructor Guides
    • PDFs
      • Activity 1 - Microfluidics Instructor Guide (MEMS_video_AC1_IG.pdf 697 KB)
      • Activity 2 - Optical MEMS Instructor Guide (MEMS_video_AC2_IG.pdf 589 KB)
      • Activity 3 - MEMS Sensors Design Instructor Guide (MEMS_video_AC3_IG.pdf 287 KB)
      • Final Assessment Instructor Guide (MEMS_video_FA_IG.pdf 251 KB)
      • Knowledge Probe (Pre-Assessment) Instructor Guide (MEMS_video_KP_IG.pdf 232 KB)
      • Learning Module Map (MEMS_video_P1_LM_Map.pdf 321 KB)
      • Script with Chapters (Scene Selections) (MEMS_video_supplement_script.pdf 225 KB)
    • Word Docs
      • Activity 1 - Microfluidics Instructor Guide ​​​​​​ (MEMS_video_AC1_IG_August2017.docx 945 KB)
      • Activity 2 - Optical MEMS Instructor Guide (MEMS_video_AC2_IG_August2017.docx 420 KB)
      • Activity 3 - MEMS Sensors Design Instructor Guide (MEMS_video_AC3_IG_August2017.docx 134 KB)
      • Final Assessment Instructor Guide (MEMS_video_FA_IG_August2017.docx 152 KB)
      • Knowledge Probe (Pre-Assessment) Instructor Guide (MEMS_video_KP_IG_August2017.docx 145 KB)
      • Learning Module Map (MEMS_video_P1_LM_Map_August2017.docx 222 KB)
      • Script with Chapters (Scene Selections) (MEMS_video_supplement_script.doc 105 KB)
  • Participant Guides
    • PDFs
      • Activity 1 - Microfluidics Participant Guide (MEMS_video_AC1_PG.pdf 741 KB)
      • Activity 2 - Optical MEMS Participant Guide (MEMS_video_AC2_PG.pdf 549 KB)
      • Activity 3 - MEMS Sensors Design Participant Guide (MEMS_video_AC3_PG.pdf 349 KB)
      • Final Assessment Participant Guide (MEMS_video_FA_PG.pdf 221 KB)
      • Knowledge Probe (Pre-Assessment) Participant Guide (MEMS_video_P1_KP_PG.pdf 748 KB)
      • Script with Chapters (Scene Selections) (MEMS_video_supplement_script.pdf 225 KB)
    • Word Docs
      • Activity 1 - Microfluidics Participant Guide (MEMS_video_AC1_PG_August2017.docx 1 MB)
      • Activity 2 - Optical MEMS Participant Guide (MEMS_video_AC2_PG_August2017.docx 416 KB)
      • Activity 3 - MEMS Sensors Design Participant Guide (MEMS_video_AC3_PG_July2017.docx 229 KB)
      • Final Assessment Participant Guide (MEMS_video_FA_PG_August2017.docx148 KB)
      • Knowledge Probe (Pre-Assessment) Participant Guide (MEMS_video_P1_KP_PG_August2017.docx 600 KB)
      • Script with Chapters (Scene Selections) (MEMS_video_supplement_script.doc 105 KB)
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Url http://scme-support.org/index.php/educational-materials/category-02/me...
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Alternate Title Microelectromechanical Systems: Making Micro Machines Learning Module
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Date Issued 2010
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