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SCME Webinar Slides - Microsystems Processes Part II - Photolithography and Etch

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These presentation slides are from the Microsystems Processes Part II - Photolithography and Etch webinar and are provided by the Southwest Center for Microsystems Education. Topics include the role of photolithography and etch within microsystems fabrication, the photolithography process, types of Etch processes, wet vs. dry etch, and chemical vs. physical etch.

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Date Issued 2012-11
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