Dry Thermal Oxidation Process

In this video, created by Support Center for Microsystems Education (SCME), viewers can watch an animation on the dry thermal oxidation process. This animation "illustrates the chemistry of a dry thermal oxidation process that is used to grow silicon dioxide (SiO2) on a silicon (Si) wafer. In a dry oxidation process, oxygen gas (O2) interacts with the silicon atoms at the SiO2 - Si interface to form SiO2. This process is discussed in more detail in the Deposition Overview for MEMS Learning Module, which can be found on the SCME website along with supplementary materials.