History of MEMS - An Introduction

In this video, created by Support Center for Microsystems Education (SCME), viewers learn about the history of microelectromechanical systems (MEMS) in this 49:17 minute lecture by Dr. Matthias W. Pliel from Central New Mexico Community College. The lecture and slides cover the developments made in MEMS related technology in the twentieth century, culminating with BioMEMS and NEMS (nanoelectromechanical systems). Viewers can learn more on this topic in the History of MEMS Learning Module which can be found on the SCME website along with supplementary materials.