LIGA Micromachining
This video, created by Support Center for Microsystems Education (SCME), provides an overview of the LIGA (Lithography, Electroplating, and Molding) technique for micromachining. The lecture runs for 7:25 seconds and describes LIGA as part of micromachining fabrication, including lithography, process, and post-process steps.
About this Resource
Alternate Title
MEMS Micromachining Part III - LIGA
Date Issued
August 6th, 2012
Resource Type
Audience
Education Level
Language
Subject
GEM Subject
Relation
ATE Contributor
Associated Files
Archived
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