MEMS Pressure Sensor Operation

This animation, created by Support Center for Microsystems Education (SCME), allows viewers to observe the operation of a micropressure sensor and the packaging of a micropressure sensor array. The animation illustrates "the sensing circuit for the pressure sensor is a Wheatstone Bridge configuration with two variable resistors (strain gauges) that change in resistance with a change in pressure. The sensing circuit is mounted on top of a fixed pressure chamber referred to as the reference chamber. When the pressures above and below the sensing circuit are different, the membrane flexes causing a change in bridge resistance." A supporting learning module, Wheatstone Bridge, can be downloaded from the SCME website under Educational Materials.