MEMS Cantilevers - Sacrificial Layer Removal

This animation, created by Support Center for Microsystems Education (SCME), "illustrates the removal or etch of the sacrificial layer of silicon dioxide. Removing this layer allows the micro-cantilevers to move. Such cantilevers are used as sensors for a variety of applications." The supporting MEMS Cantilever Learning Modules and activities can be downloaded from the SCME website under Educational Materials.