Deposition Overview for Microsystems Learning Module

Module Description:

This module, from Support Center for Microsystems Education (SCME), introduces "students to the common processes used to deposit thin films in the fabrication of micro-size devices." This module is divided into the following six units: Knowledge Probe (Pre-test), Primary Knowledge, Terminology Activity, Science of Thin Films Activity, Deposition Research Activity, and Assessment.

Module Contents:

This module includes seven instructor guides and six participant guides. PDF and DOC versions are provided for all of the guides. The included guides are Deposition Overview for Microsystems Primary Knowledge, Deposition Overview for Microsystems Learning Module, Deposition Overview for Microsystems Knowledge Probe, three activities, and a Final Assessment. Instructor guides include additional content such as instructor notes and questions and answers. A Learning Module Map (LM) Instructor Guide is also included. 

The LM map provides information about the module including module contents, target audience, and a map that is divided into the following three sections: Important Steps, Key Points, and Reasons. 

Deposition Overview for Microsystems Primary Knowledge is an instructional unit with the following objectives:

• Briefly describe two (2) deposition processes.
• Create a chart that illustrates the type of thin films deposited which each deposition process.

The following sections are included in this unit guide: Introduction, Objectives, Key Terms, What is Deposition, What is the Purpose of a Deposited Layer, Type of Film vs. Application, MEMS Deposition Processes, and more. 

The Deposition Terminology Activity should be given to students after they have read the Deposition Overview for Microsystems Primary Knowledge unit. During the activity, students complete a crossword puzzle to demonstrate their understanding of "the terminology and acronyms associated with deposition processes."

In the What Do You Know About Deposition Activity, students demonstrate their "knowledge of deposition for microsystems, by explaining at least two deposition processes, identifying the applications of microsystems in which these processes would be used and studying recent advances and improvements of these processes for microsystems fabrication." Students should read the Deposition Overview for Microsystems Primary Knowledge unit prior to this activity. Objectives include:

• Identify the type of deposition process associated with different aspects of microsystems fabrication.
• Describe three deposition processes used in microsystems fabrication.
• Discuss at recent research and improvements in at least one of these deposition processes.

In the Science of Thins Films Activity, students engage in "a hands-on study of thin films through a detailed exploration of silicon dioxide (oxide)." During the activity "participants calculate etch rates as well as identify the color-thickness relationship of silicon dioxide." Objectives include:

• Interpret Oxide thickness vs. temperature graphs.
• Using a color chart, estimate the thickness of silicon dioxide removed.
• Using your results, create two graphs showing the relationship between oxide thickness and time.

The Deposition Overview for Microsystems Final Assessment includes 25 questions and is intended to be given to students at the completion of the module.

Two presentations are also included with the following titles: Deposition Overview for Microsystems and Science of Thin Films. Each presentation includes an overview, objectives, and additional information about their respective topic. The presentations are provided in both PDF and PowerPoint formats.

For orientation purposes Fab_PrDepo_LM_MAP.pdf is included as a separate attachment and offers a sample of the type of material included in this module. 

Below is a list of the files included in the .zip attachments. The size of each file is included in parenthesis. 

Deposition for Microsystems Learning Module (40 files, 87.8 MB)

• Instructor Guides
  • Docs 
    • Deposition Terminology Activity Instructor Guide (Fab_PrDepo_AC00_IG_March2017.docx 59 KB)
    • What Do You Know About Deposition? Activity Instructor Guide (Fab_PrDepo_AC02_IG_March2017.docx 134 KB)
    • Science of Thin Films Activity Deposition Overview for Microsystems Instructor Guide (Fab_PrDepo_AC10_IG_March2017.docx 15.9 MB)
    • Deposition Overview for Microsystems Final Assessment Instructor Guide (Fab_PrDepo_FA00_IG_March2017.docx 178 KB)
    • Deposition Overview for Microsystems Knowledge Probe Instructor Guide (Fab_PrDepo_KP_IG_March2017.docx 178 KB)
    • Deposition Overview for Microsystems Learning Module (Fab_PrDepo_LM_MAP_IG_March2017.docx 28 KB)
    • Deposition Overview for Microsystems Primary Knowledge Instructor Guide (Fab_PrDepo_PK00_IG_March2017.docx 1.9 MB)
  • PDFs 
    • Deposition Terminology Activity Instructor Guide (Fab_PrDepo_AC00_IG.pdf 207 KB)
    • What Do You Know About Deposition? Activity Instructor Guide (Fab_PrDepo_AC02_IG.pdf 231 KB)
    • Science of Thin Films Activity Deposition Overview for Microsystems Instructor Guide (Fab_PrDepo_AC10_IG.pdf 16.7 MB)
    • Deposition Overview for Microsystems Final Assessment Instructor Guide (Fab_PrDepo_FA00mc_IG.pdf 274 KB)
    • Deposition Overview for Microsystems Knowledge Probe Instructor Guide (Fab_PrDepo_KP_IG.pdf 273 KB)
    • Deposition Overview for Microsystems Learning Module (Fab_PrDepo_LM_MAP.pdf 130 KB)
    • Deposition Overview for Microsystems Primary Knowledge Instructor Guide (Fab_PrDepo_PK00_IG.pdf 2.1 MB)
• Participant Guides
  • Docs
    • Deposition Terminology Activity Participant Guide (Fab_PrDepo_AC00_PG_March2017.docx 53 KB)
    • What Do You Know About Deposition? Activity Participant Guide (Fab_PrDepo_AC02_PG_March2017.docx 130 KB)
    • Science of Thin Films Activity Deposition Overview for Microsystems Participant Guide (Fab_PrDepo_AC10_PG_March2017.docx 15.9 MB)
    • Deposition Overview for Microsystems Assessment Participant Guide (Fab_PrDepo_FA00_PG_March2017.docx 176 KB)
    • Deposition Overview for Microsystems Knowledge Probe Participant Guide (Fab_PrDepo_KP_PG_March2017.docx 176 KB)
    • Deposition Overview for Microsystems Primary Knowledge Participant Guide (Fab_PrDepo_PK00_PG_March2017.docx 1.9 MB)
  • PDFs
    • Deposition Terminology Activity Participant Guide (Fab_PrDepo_AC00_PG.pdf 155 KB)
    • What Do You Know About Deposition? Activity Participant Guide (Fab_PrDepo_AC02_PG.pdf 125 KB)
    • Science of Thin Films Activity Deposition Overview for Microsystems Participant Guide (Fab_PrDepo_AC10_PG.pdf 16.6 MB)
    • Deposition Overview for Microsystems Assessment Participant Guide (Fab_PrDepo_FA00_PG_March2017.docx 246 KB)
    • Deposition Overview for Microsystems Knowledge Probe Participant Guide (Fab_PrDepo_KP_PG.pdf 248 KB)
    • Deposition Overview for Microsystems Primary Knowledge Participant Guide (Fab_PrDepo_PK00_PG.pdf 2.1 MB)
• Presentations
  • PDFs
    • Deposition Overview for Microsystems (Presentation-DepositionOverview.pdf 3.9 MB)
    • Science of Thin Films (Presentation-ScienceOfThinFilmsAC.pdf 3.3 MB)
  • PowerPoints
    • Deposition Overview for Microsystems (Presentation_DepositionOverview.pptx 2 MB)
    • Science of Thin Films (Presentation-ScienceofThinFilmsAC.pptx 2.4 MB)