Nebraska Nanoscale Facility Virtual Tour: Etching Room (Dry and Wet Etching)

This simulation, provided by the Nebraska Nanoscale Facility (NNF), describes the process of etching; the simulation shows how the process of etching in microfabrication removes layers of the surface being etched. This surface is called the wafer, and the parts of the surface which are not meant to be etched are protected by a "masking" material. Additional resources related to the process of both wet and dry etching accompany this simulation. These resources include both a teacher and participant guide for a dry etching activity; a wet etching activity intended for high school audiences; and two videos that detail the microsystem etch process.