MEMS Micromachining Overview Learning Module

Module Description:

This module, from Support Center for Microsystems Education (SCME), provides an "overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (microelectromechanical systems)." This module is divided into the following five units: Knowledge Probe (KP) or Pre-test, Primary Knowledge (PK), Terminology Activity, Research Activity, and Final Assessment. 

Module Contents: 

This module includes six instructor guides, five participant guides, and a presentation. Guides are provided in .pdf and .docx formats. The included guides are MEMS Micromachining Overview Primary Knowledge Unit, MEMS Micromachining Overview Knowledge Probe (Pre-test), two activities, and an assessment. Instructor guides include additional content such as instructor notes and questions and answers. A Learning Module Map (LM) Instructor Guide is also included. 

The LM map provides information about the module including module contents, target audience, and a map that is divided into the following three sections: Important Steps, Key Points, and Reasons. 

MEMS Micromachining Overview Primary Knowledge is an instructional unit with the following objectives:

• Identify the distinguishing elements of bulk micromachining, surface micromachining and LIGA.
• Identify microsystems and microsystem components that are constructed using each of the three micromachining processes.

The following sections are included in this unit guide: Introduction, Objectives, Terminology, Surface Micromachining, What is a Sacrificial Layer, Surface Micromachining Materials, Surface Micromachining Layers and Processes, and more.

MEMS Micromachining Overview Knowledge Probe (Pre-test) includes 18 questions "to assess the participants current knowledge of micromachining processes - surface, bulk and LIGA," and is intended to be given at the start of the module.

In the MEMS Micromachining Terminology Activity, students complete a crossword puzzle and answer post-activity questions. Prior to starting this activity, students should read through the MEMS Micromachining Overview Primary Knowledge unit. Objectives for this activity include:

• Identify the correct terms used for several definitions or statements related to MEMS micromachining.
• Describe the micromachining processes required to fabricate various MEMS devices.

The MEMS Micromachining Research Activity provides students with "an opportunity to further explore a MEMS Micromachining application and its process." Prior to starting this activity, students should read through the MEMS Micromachining Overview Primary Knowledge unit. Objectives for this activity include:

• Identify the applications of a specific MEMS.
• Outline and describe the steps of the micromachining process used to fabricate a specific MEMS.

The MEMS Micromachining Overview Final Assessment includes 20 multiple choice questions and is intended to be given at the conclusion of the module. 

A presentation is also included that provides an overview of MEMS micomachining. Topics covered include: Surface Micromachining, Bulk Micromachining, LIGA (Lithographie, Galvonoformung, and Abformung), and Summary. The presentation is provided in both .pdf and .pptx formats.

For orientation purposes Fab_MicroM_P1_LM_MAP_IG.pdf is included as a separate attachment and offers a sample of the type of material included in this module. 

Below is a list of the files included in the .zip attachment. The size of each file is included in parenthesis. 

MEMS Micromachining Overview Learning Module (32 files, 34.3 MB)

• Instructor Guides
  • Docs
    • MEMS Micromachining Terminology Activity Instructor Guide (Fab_MicroM_AC00_IG_June2017.docx 61 KB)
    • MEMS Micromachining Research Activity Instructor Guide (Fab_MicroM_AC01_IG_June2017.docx 888 KB)
    • MEMS Micromachining Overview Final Assessment Instructor Guide (Fab_MicroM_FA00mc_IG_June2017.docx 220 KB)
    • MEMS Micromachining Overview Knowledge Probe (Pre-test) (Fab_MicroM_KP_IG_June2017.docx 405 KB)
    • MEMS Micromachining Overview Learning Module (Fab_MicroM_P1_LM_MAP_IG_June2017.docx 130 KB)
    • MEMS Micromachining Overview Primary Knowledge Unit Instructor Guide (Fab_MicroM_PK00_IG_June2017.docx 4.4 MB)
  • PDFs
    • MEMS Micromachining Terminology Activity Instructor Guide (Fab_MicroM_AC00_IG.pdf 193 KB)
    • MEMS Micromachining Research Activity Instructor Guide (Fab_MicroM_AC01_IG.pdf 452 KB)
    • MEMS Micromachining Overview Final Assessment Instructor Guide (Fab_MicroM_FA00mc_IG.pdf 316 KB)
    • MEMS Micromachining Overview Knowledge Probe (Pre-test) Instructor Guide (Fab_MicroM_KP_IG.pdf 379 KB)
    • MEMS Micromachining Overview Learning Module (Fab_MicroM_P1_LM_MAP_IG.pdf 120 KB)
    • MEMS Micromachining Overview Primary Knowledge Unit Instructor Guide (Fab_MicroM_PK00_IG.pdf 5 MB)
• Participant Guides
  • Docs
    • MEMS Micromachining Terminology Activity Participant Guide (Fab_MicroM_AC00_PG_June3017.docx 56 KB)
    • MEMS Micromachining Research Activity Participant Guide (Fab_MicroM_AC01_PG_June2017.docx 862 KB)
    • MEMS Micromachining Overview Final Assessment Participant Guide (Fab_MicroM_FA00mc_PG_June2017.docx    293 KB)
    • MEMS Micromachining Overview Learning Module (Fab_MicroM_P1_KP_PG_June2017.docx 396 KB)
    • MEMS Micromachining Overview Primary Knowledge Unit Participant Guide (Fab_MicroM_PK00_PG_June2017.docx 4.4 MB)
  • PDFs
    • MEMS Micromachining Terminology Activity Participant Guide (Fab_MicroM_AC00_PG.pdf 169 KB)
    • MEMS Micromachining Research Activity Participant Guide (Fab_MicroM_AC01_PG (1).pdf 446 KB)
    • MEMS Micromachining Overview Final Assessment Participant Guide (Fab_MicroM_FA00mc_PG.pdf 301 KB)
    • MEMS Micromachining Overview Learning Module (Fab_MicroM_P1_KP_PG.pdf 389 KB)
    • MEMS Micromachining Overview Primary Knowledge Unit Participant Guide (Fab_MicroM_PK00_PG.pdf 5 MB)
• Presentation
  • MEMS Micromachining Overview (MEMS_Micromachining_Presentation_notes.pdf 5.9 MB)
  • MEMS Micromachining Overview (MEMS_Micromachining_Presentation_notes.pptx 3.4 MB)