Learning Activities 10.1 – 10.4: This Film Deposition Using Rough Vacuum Equipment Trainer

This 14-page learning activity is from the Introduction to Vacuum Technology Student and Instructor Laboratory Manuals that accompany the Introduction to Vacuum Technology E-Book published by Erie Community College. The activity has students modify a rough vacuum system for thin film deposition application, deposit aluminum thin film of various thickness, and characterize deposited thin film with a microscope, profilometer, and micrometer.

A summary of learning activities, learning objectives, a suggested pre-lab assignment, theoretical background, the activity procedure, and more are included. Student learning outcomes include:

1. Convert rough vacuum equipment trainer into thermal evaporator based on schematics.
2. Practice vacuum cleanliness procedures when assembling and using the vacuum-based system.
3. Perform correct sequence of operations for thin film deposition.
4. Characterize deposited thin film using microscope, profilometer or micrometer.

The E-book, laboratory manuals, other learning activities, and related videos are available to view separately.