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This is a course description for Massachusetts Institute of Technology’s (MIT) course 6.152J/3.155J, Micro/Nano Processing Technology.  This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, and chemical vapor deposition.  Detailed lecture slides and notes, assignments, and exams are included. This course description is part of MIT OpenCourseWare, an initiative of the Massachusetts Institute of Technology to put all of the educational materials from its undergraduate and graduate-level courses online and make them freely accessible.

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Date Issued 2008
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