Nebraska Nanoscale Facility Virtual Tour: Photolithography (E-beam Lithography, Optic Lithography, FIB)

This video, provided by the Nebraska Nanoscale Facility (NNF), offers a tour of a photolithography room. Photolithography, also known as optical lithography or UV lithography is "a process used in microfabrication to pattern parts of a thin film or the bulk of a substrate," using "light to transfer geometric pattern from a photomask to a light-sensitive chemical photoresist." The photolithography room includes a dark room that filters out light, fume hoods for electron beam lithography, and a focused-ion beam system. The video is 1:09 minutes in length and is accompanied by a description of the study of photolithography. Additionally, further resources related to the study of photolithography are provided on this webpage. This includes a lesson plan that allows students grades K-12 to explore fabrication through electroplating. There is an activity, a teacher guide, and a participant guide that make up this lesson plan. Further activities and videos related to photolithography are also provided on this webpage. This includes lessons on both dry etching and nanoscale electrodeposition.