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Nanotechnology Principles Lab: Lithography



This Nanotechnology Principles Lab: Lithography is provided by SHINE: Seattle's Hub for Industry-driven Nanotechnology Education. This lab includes activities that are intended to teach students about lithography. The lab includes the following learning objectives: 

  • To understand how lithography, including photolithography and soft lithography is used to make electronic and biomedical devices and nano- and micro- scale 3D printed objects
  • To make simple patterns using photolithography and soft lithography type processes
  • To understand how microfluidics are used in biological analysis
  • To understand that chips can be made in many designs depending on the purpose of the chip
  • To understand that analysis of materials at the micro and nano scale require less space, fluid, and can be done differently because of how properties of materials change at a small scale - the basis of "lab on a chip"


This collection of resources includes one lithography presentation, three labs, a lithography background document, and material safety data sheets.    

The Lithography PowerPoint presentation covers topics such as photolithography, soft lithography, negative photoresist, microfluidics, lab on a chip applications, parallel analysis, laminar flow, microfluidic videos, and more. 

The three labs included cover 3-D printing, photolithography, and pH sensors. Labs may include pre-lab preparations, pre-lab materials needed, a pre-lab procedure, safety hazards and precautions, pre-lab questions, and discussion questions. 

The Lithography Background document provides learning outcomes and background information about lithography and includes information about the following: Washington EARL Alignment, Oregon Content Standards Alignment, applications, vocabulary, MSDS/safety information, and lithography materials. 

For orientation purposes the 'SHINE_Lithography Background' PDF is included as a separate attachment and offers a sample of the type of material included in this curriculum. 

Below is a list of the files contained within the .zip attachment. The size of each file is included in parenthesis. 

Lithography Lab (10 files, 7.1 MB)

  • Lithography (SHINE_Lectures_Lithography.pptx 835 KB)
  • 3-D Printing (SHINE_Lithography - 3D Printing Lab.pdf 255 KB)
  • 3-D Printing Safety Data Sheets (SDS) (SHINE_Lithography - 3D Printing SDS.pdf 646 KB)
  • Lithography (SHINE_Lithography Background.pdf 369 KB)
  • Photolithography - Version A Cover Sheet (SHINE_Photolithography Lab - Version A.pdf 1.4 MB)
  • Photolithography - Version B Cover Sheet (SHINE_Photolithography Lab - Version B.pdf 1.4 MB)
  • Photolithography Safety Data Sheets (SDS) (SHINE_Photolithography SDS.pdf 1.1 MB)
  • Soft Lithography: Making a pH Sensor Microfluidic Device (SHINE_Soft Lithography - pH Sensor Lab.pdf 296 KB)
  • Soft Lithography: pH Sensor Safety Data Sheets (SDS) (SHINE_Soft Lithography - pH Sensor SDS.pdf 785 KB)
Archived with ATE Central
Associated File
Sample File
ATE Area
GEM Subject
Date Issued 2015-12-07
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