Application of Virtual Reality to Improve Nanotechnology Education

This 7-page article is provided by Utah Valley University and discusses the use of virtual reality in nanotechnology education. This article "... share[s] development methods for creating virtual reality simulations for an electron microscope, an RF sputter deposition unit, a photolithography process laboratory including spin coater and mask aligner, and an atomic force microscope." Images are also provided that show "... the process steps that accomplish the training on these instruments."